Method of vapor deposition

Details Method of vapor deposition Method of vapor deposition

1977-09-23

1980-01-08

Kaplan, Morris

Coating processes

Coating by vapor, gas, or smoke

118719, 118DIG5, C23C 1100, C23C 1312

Patent

active

041827830

ABSTRACT:
An apparatus and method are provided for fluidizing and vaporizing particulate solid coating reactants by first establishing a fluidized bed of dispersed particulant solid coating reactants and thereafter drawing a volume of fluidizing gas and suspended particulate solid coating reactant to a vaporizer while mixing an additional volume of gas therewith and then vaporizing the dispersed particulate solid coating reactant in the reactant-gas mixture. The reactant-gas mixture is then directed into contact with a hot substrate to be coated in order to deposit a film thereon.

REFERENCES:
patent: 2780553 (1957-02-01), Pawlyk
patent: 3198167 (1965-08-01), Bakish et al.
patent: 3786309 (1974-01-01), Miottel
patent: 3852098 (1974-12-01), Bloss et al.
patent: 3970037 (1976-07-01), Sopko

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