Method of vapor deposition

Details Method of vapor deposition Method of vapor deposition

1979-09-12

1982-11-16

Kendall, Ralph S.

Coating processes

Coating by vapor, gas, or smoke

Base includes an inorganic compound containing silicon or...

427109, 427252, 427255, 4272553, 118719, C23C 1100, C23C 1312

Patent

active

043594930

ABSTRACT:
A method is disclosed for fluidizing and vaporizing particulate solid coating reactants by establishing a fluidized bed of dispersed particulate solid coating reactants, drawing a volume of fluidizing gas and suspended particulate solid coating reactant into a vaporizer while mixing an additional volume of gas therewith, and vaporizing the dispersed particulate solid coating reactant in the reactant gas mixture. The vaporized coating reactant may then be directed into contact with a substrate to be coated in order to deposit a film thereon.

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