Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-10-06
2008-05-13
Phan, James (Department: 2872)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S846000, C359S849000, C359S900000
Reexamination Certificate
active
07372614
ABSTRACT:
A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.
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Office Action and Translation of Office Action for Japanese Patent Application No. 2004-219135 drafted on October 30, 2007, 7 pages.
Govil Pradeep K.
Guzman Andrew
ASML Holding N.V.
Phan James
Sterne, Kessler, Goldstein & Fox P.P.L.C
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