Optical waveguides – Accessories – Attenuator
Reexamination Certificate
2008-07-29
2008-07-29
Healy, Brian M (Department: 2883)
Optical waveguides
Accessories
Attenuator
C385S129000, C385S014000, C385S131000, C385S141000, C065S386000, C065S392000, C065S425000, C398S085000
Reexamination Certificate
active
07406244
ABSTRACT:
The present invention provides an ultra-thin high-precision glass optic and method of manufacturing the same. The optic has an axial thickness that is less than 1,000 microns. A pattern and/or coating is disposed on a surface of the optic to provide attenuation of light in an optical system. In an embodiment, the optic is manufactured by disposing a pattern on a surface of a reticle. The pattern is covered with a first protective coating to protect the pattern. Individual optics are cut from the reticle so that each optic includes a portion of the pattern. The optic is thinned by removing material until it has an axial thickness of less than 1,000 microns. The optic is cleaned after thinning and covered with an anti-reflective coating.
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ASML Holding N.V.
Healy Brian M
Sterne Kessler Goldstein & Fox P.L.L.C.
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