Method of using an evaporation source

Details Method of using an evaporation source Method of using an evaporation source

1983-08-31

1985-11-05

Rutledge, L. Dewayne

Alloys or metallic compositions

Processes

427 76, 420579, C22C 2800

Patent

active

045513031

ABSTRACT:
An evaporation source designed so that two or more materials to be evaporated are heated to evaporate by respective heaters, as well as method of using such an evaporation source are disclosed. The evaporation source further includes means for detecting the temperature of the slowly evaporating material and means for controlling the heaters on the basis of the detected temperature. The method of using this evaporation source comprises controlling the temperature of the slowly evaporating material in order to control the temperature of the evaporation source in such a manner that the respective materials are simultaneously heated to evaporate and deposit a film on a substrate.

REFERENCES:
patent: 4126457 (1978-11-01), Ciuffini

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