Method of using a sensor gas to determine erosion level of...

Details Method of using a sensor gas to determine erosion level of... Method of using a sensor gas to determine erosion level of...

2006-06-20

2006-06-20

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

With plural diverse test or art

C356S316000, C250S282000

Reexamination Certificate

active

07064812

ABSTRACT:
A method and system are provided for monitoring erosion of system components in a plasma processing system. The system components contain a gas emitter that can release a sensor gas into a plasma process environment. The sensor gas can produce characteristic fluorescent light emission when exposed to a plasma. The method can evaluate erosion of system components in a plasma, by monitoring fluorescent light emission and a mass signal from the sensor gas. Consumable system components that can be monitored using the method include rings, shields, electrodes, baffles, and liners.

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patent: 5712702 (1998-01-01), McGahay et al.
patent: 5798016 (1998-08-01), Oehrlein et al.
patent: 5947053 (1999-09-01), Burnham et al.

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