Coating processes – Nonuniform coating
Reexamination Certificate
2011-08-02
2011-08-02
Culbert, Roberts (Department: 1716)
Coating processes
Nonuniform coating
C430S280100, C427S258000
Reexamination Certificate
active
07989026
ABSTRACT:
Disclosed herein is a method of controlling the orientation of microphase-separated domains in a block copolymer film, comprising forming an orientation control layer comprising an epoxy-containing cycloaliphatic acrylic polymer on a surface of a substrate, irradiating and/or heating the substrate to crosslink the orientation control layer, and forming a block copolymer assembly layer comprising block copolymers which form microphase-separated domains, on a surface of the orientation control layer opposite the substrate. The orientation control layer can be selectively cross-linked to expose regions of the substrate, or the orientation control layer can be patterned without removing the layer, to provide selective patterning on the orientation control layer. In further embodiments, bilayer and trilayer imaging schemes are disclosed.
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Cheng Joy
Kim Ho-cheol
Rettner Charles T.
Sanders Daniel P.
Sooriyakumaran Ratnam
Cantor & Colburn LLP
Culbert Roberts
International Business Machines - Corporation
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