Coating processes – Coating by vapor – gas – or smoke – Base supplied constituent
Patent
1985-03-19
1986-03-18
Childs, S. L.
Coating processes
Coating by vapor, gas, or smoke
Base supplied constituent
427400, C23C 1600
Patent
active
045768374
ABSTRACT:
The method of treating a surface chemically by exposing the surface to a treating gas at high pressure for a time during which a surface reaction occurs, and then reducing the pressure of the gas for a time and removing reaction byproducts and then continuing the cycles of high pressure and low pressure until the surface reaction is completed.
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Lee et al, "Eu.sub.2 O.sub.3 Passive Layer on RF Sputtered EuO Films", IBM Technical Disclosure Bulletin, vol. 13, No. 8, Jan. 1971.
Acevedo Efrain
Saud Abel
Tarancon Gregorio
Childs S. L.
Green Robert A.
Tarancon Corporation
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