Method of treating surfaces

Coating processes – Coating by vapor – gas – or smoke – Base supplied constituent

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427400, C23C 1600

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active

045768374

ABSTRACT:
The method of treating a surface chemically by exposing the surface to a treating gas at high pressure for a time during which a surface reaction occurs, and then reducing the pressure of the gas for a time and removing reaction byproducts and then continuing the cycles of high pressure and low pressure until the surface reaction is completed.

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patent: 4268538 (1981-05-01), Toole et al.
patent: 4296151 (1981-10-01), Boultinghouse
patent: 4474828 (1984-10-01), Young et al.
Lee et al, "Eu.sub.2 O.sub.3 Passive Layer on RF Sputtered EuO Films", IBM Technical Disclosure Bulletin, vol. 13, No. 8, Jan. 1971.

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