Method of treating fine particle dust in manufacturing process o

Details Method of treating fine particle dust in manufacturing process o Method of treating fine particle dust in manufacturing process o

1995-02-24

1996-07-16

Spitzer, Robert

Gas separation: processes

Difference in molecular velocity, density, or momentum of...

Centrifugal force

95270, 95277, 95287, 55329, 55333, 55429, 55477, 55487, B01D 3315, B01D 4612

Patent

active

055362982

ABSTRACT:
In a method of treating a fine particle dust in a manufacturing process of semiconductor elements wherein the fine particle dust is separated and collected from an air which includes the fine particle dust produced from a source of generating the fine particle dust generated in a process of manufacturing semiconductor elements by filtering air with a laminated filter which comprises at least three filters, each of which having a smaller mesh is arranged to located from an down-stream in order. The method comprising the step of separating removing water and oil by passing the air through a rotary brush prior before the air from the source of generating the fine particle dust is filtered with the laminated filter. The apparatus for carrying out the method.

REFERENCES:
patent: 1689104 (1928-10-01), Bennett
patent: 2468354 (1949-04-01), Abbrecht
patent: 2768707 (1956-10-01), Campbell
patent: 3126263 (1964-03-01), Schwab
patent: 3174264 (1965-03-01), McKnab
patent: 3435597 (1969-04-01), Levy
patent: 4084945 (1978-04-01), Chirico
patent: 4881952 (1989-11-01), Masaru
patent: 5049170 (1991-09-01), Parnoff

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