Method of treating adherent semiconductor particles to break the

Solid material comminution or disintegration – Processes – By utilizing kinetic energy of projected or suspended material

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241 18, B02C 1906

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054132851

ABSTRACT:
Adherent silicon spheres (10) are broken apart into separate spheres by entraining them in a high velocity gas stream (12) which is directed at a surface (20). When the adherent spheres (10) impact on the surface (20) they break apart. The gas (12) and the separated spheres (10) are directed away from the surface (20) along divergent paths and the spheres (10) are collected for use.

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patent: 5012619 (1991-05-01), Knepprath et al.
patent: 5069740 (1991-12-01), Levine et al.

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