Method of treating a monocrystalline body utilizing a measuring

Details Method of treating a monocrystalline body utilizing a measuring Method of treating a monocrystalline body utilizing a measuring

1978-09-13

1979-12-04

Rutledge, L. Dewayne

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

29574, 148 15, 156601, 156626, 427 10, H01L 2166, H01L 2120

Patent

active

041770943

ABSTRACT:
A method in which a monocrystalline body is subjected in a gas atmosphere to a treatment for changing the thickness of the body, in which the thickness of the body is controlled by means of a measuring member which is subjected to the same treatment and which measuring member, on its side which is subjected to the treatment, consists of a monocrystalline layer and an adjoining substratum of a material having a refractive index differing of that the monocrystalline layer material. The measuring member is obtained by providing a substrate, depositing the monocrystalline layer on the substrate, forming the substratum on the monocrystalline layer, and then removing the substrate to form the measuring member.

REFERENCES:
patent: 3099579 (1963-07-01), Spitzer et al.
patent: 3449071 (1969-06-01), Campbell et al.
patent: 3620814 (1971-11-01), Clark et al.
patent: 3647581 (1972-03-01), Mash
patent: 3799800 (1974-03-01), Thelen et al.
patent: 4024291 (1977-05-01), Wilmanns
patent: 4118857 (1978-10-01), Wong
Dupuis et al., "High-Efficiency . . . Vapor Deposition" Applied Physics Letters, vol. 31, No. 3, Aug. 1, 1977, pp. 201-203 (note p. 202).

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