Method of transistor level heterogeneous integration and system

Details Method of transistor level heterogeneous integration and system Method of transistor level heterogeneous integration and system

2011-01-25

2011-01-25

Dickey, Thomas L (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

C257SE21603, C257SE27012, C438S689000

Reexamination Certificate

active

07875952

ABSTRACT:
The present invention relates to a process for fabricating integrated circuit system. More particularly, the process allows for fabrication of highly integrated system-on-a-chip modules through heterogeneous integration of different semiconductor technologies wherein alignment targets on the base semiconductor are used for precise lateral positioning of device structures above.

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