Method of transferring wafers using vacuum

Details Method of transferring wafers using vacuum Method of transferring wafers using vacuum

1990-10-30

1992-03-31

Werner, Frank E.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414217, 414417, 414416, 414404, 187 17, B65G 6500

Patent

active

051002876

ABSTRACT:
The apparatus transfers a quantity of wafers from a first wafer boat to a second wafer boat. A wafer platform positioned beneath a wafer boat rises and transports the wafers to a pair of wafer grips which hold the wafers until the wafer platform is lowered and a second wafer about is in position to receive the wafers. The wafer platform is actuated by the negative pressure applied to alternating sides of a stage which divides a sealed cabinet into two portions. A vacuum is applied to alternating sides of the stage, while ambient air is introduced into the other side, causing the stage to move in the direction of lower pressure. The platform is affixed to the stage on at least two points.

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