Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2000-09-25
2001-07-10
Metjahic, Safet (Department: 2858)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S754090, C414S403000
Reexamination Certificate
active
06259247
ABSTRACT:
FIELD OF THE INVENTION
This invention relates to a horizontal transfer test handler for transferring IC devices to and from a test head of an IC tester, and more particularly, to a method of transferring IC devices with use of a horizontal transfer test handler that automatically recognizes types and positions of IC devices, existence of the IC devices, types of device trays, and the like, through a video data acquisition means.
BACKGROUND OF THE INVENTION
Test handlers are frequently used for testing IC devices in combination with IC testers for automatically transferring IC devices to and from test heads of the IC testers. Test handlers are classified into two types, a vertical transfer type in which IC devices are transferred from the higher positions to the lower positions by their own gravity, and a horizontal transfer type in which IC devices are transferred along the horizontal surface of the test handler. This invention is directed to the horizontal transfer type test handler.
In a horizontal transfer test handler, a plurality of IC devices to be tested are provided on a device tray and horizontally transferred to a test head of an IC tester. Various test signals are supplied to the IC devices at the test head, and the resultant output signals from the IC devices are evaluated by the IC tester. The tested IC devices are classified based on the test results and transferred to the corresponding device trays.
An example of horizontal transfer test handler in the conventional technology is shown in 
FIGS. 6-8
. A horizontal transfer test handler is a robot mechanism that transfers IC devices in horizontal directions, places the IC devices on the test head of the IC tester, receives the IC devices that have been tested, and sorts the IC devices on the device trays on the basis of the test results.
As shown in 
FIG. 6
, the horizontal transfer test handler 
30
 in the prior art is comprised of a device transfer mechanism 
13
 to pick, transfer, and place the IC devices, a mobile arm 
12
 to allow movements of the device transfer mechanism 
13
 in a Y direction, an X direction rail to allow movements of the mobile arm 
12
 in an X direction, a loader area 
22
 for loading a device tray 
43
 having a plurality of IC devices to be tested, an unloader area 
23
 for receiving the IC devices that have passed the test on a device tray 
43
, sorter areas 
24
 and 
25
 for sorting the tested IC devices that have failed in the test on respective device trays 
43
, a heater area 
27
 for applying heat to the IC devices to be tested so that the IC devices are tested under a high temperature environment, an empty tray area 
26
 for placing a device tray 
43
 emptied in the loader area 
22
, and change kits 
41
 and 
42
 for accommodating different sizes and types of device trays and IC sockets.
As shown in 
FIG. 7
, the device transfer mechanism 
13
 is comprised of a suction pad 
16
 that performs suction (pick operation) and suction release (place operation) processes for IC devices 
10
 stored on a device tray 
43
. The suction force is created, for example, by a vacuum pressure. A suction arm 
15
 allows movements of the suction pad 
16
 in a Z (up-down) direction.
In 
FIG. 6
, the horizontal transfer test handler 
30
 is connected to a test head 
50
 that is electrically connected to an IC tester 
51
. The test head 
50
 has an IC socket 
40
 that acts as an interface between the IC device 
10
 under test and the test head 
50
. The IC socket 
40
 mounted on the test head 
50
 transmits electric signals from each of its contact terminals to a corresponding device pin during the test of the IC device 
10
.
The change kits are groups of mechanical parts for adjusting the test handler 
30
 to various types and sizes of IC devices and the device trays by replacing all or portions of the mechanical parts. The kind of the change kit includes a change kit 
42
 that supports the device tray 
43
 of different sizes and types. The device tray 
43
 is mounted on the loader area 
22
 while being adjusted its position by the change kit 
42
. The change kit 
41
 performs an accurate mechanical positioning for the IC socket on the test head 
50
. Thus, the change kit 
41
 adjusts the position of the IC socket 
40
 relative to the test head 
50
 in response to the size and types of the IC devices to be tested.
FIG. 8
 is a schematic diagram showing a control section of the horizontal transfer test handler. The control section is comprised of an input/output means 
61
 for receiving a control program and input data and generating test information or other test results, a controller 
62
 that interprets and executes the control program and input data, a device transfer mechanism driver 
63
 controlled by the controller 
62
. Based on the drive signals from the driver 
63
, the device transfer mechanism 
13
 is moved in the X, Y, and Z directions. Namely, a pulse motor (not shown) is controlled to drive the suction arm 
15
 in the Z direction. The mobile arm 
12
 is driven in the X direction while the device transfer mechanism 
13
 is driven in the Y direction, respectively, by the drive signals from the driver 
63
.
Referring back to 
FIG. 6
, the horizontal transfer test handler 
30
 transfers the IC device 
10
 in a horizontal direction, and presses the lead pins of the IC device 
10
 to the contact terminals of the IC socket 
40
 mounted on the test head 
50
. Test signals are applied to the IC device from the IC tester through the IC socket 
40
. The resultant signals from the IC device 
10
 are transmitted to the IC tester through the IC socket 
40
 and evaluated by comparing the resultant signals with expected data. The IC tester determines pass or fail of the IC devices 
10
. The horizontal transfer test handler 
30
 sorts the tested IC devices 
10
 according to the test results.
The IC devices 
10
 to be tested by such a system of the test handler and IC tester are IC, LSI circuits and VLSI circuits. Even when the functions are identical, IC devices are put in different type and size of packages to meet the needs in the market. For example, the kinds of packages include SOP (Small Outline Package), QFP (Quad Flat Package), BGA (Ball Grid Array Package), and so on. The number of pins of the IC devices to be connected to outside electrodes also extends to a wide range, such as from a few pins to several hundred pins. The distance between the two adjacent pins of the IC devices, i.e., a pin pitch, is very small, such as from 0.25 mm to 0.8 mm.
The device tray 
43
 stores IC devices 
10
 in its hole-like seats where each of the IC devices is positioned by tapered walls of the seat. For example, the device tray 
43
 shown in 
FIG. 6
 can store 
24
 (4×6=24) devices. The size of the device tray varies, for instance, from 100 mm to 140 mm in width, and from 206 mm to 330 mm in length.
The operation and function of the horizontal transfer test handler 
30
 is explained in the following.
Prior to the start of the test, the IC devices 
10
 to be tested are stored in the device tray 
43
 which is loaded on the loader area 
22
 of the test handler 
30
. Test programs and necessary data for testing the IC devices 
10
 are installed in the test handler 
30
 through the input/output means 
61
. The necessary data for the test includes the information on the kinds of IC devices 
10
 to be tested, the package types of the IC devices 
10
, the number of device pins, and the size of the device tray 
43
.
The suction arm 
15
 moves in the Z direction and the suction pad 
16
 performs the suction process on the IC devices 
10
 stored in the device tray 
43
. While sucking the IC device 
10
 at the tip of the suction pad 
16
, the mobile arm 
12
 and the device transfer mechanism 
13
 move in the X and Y directions to the heater area 
27
 to place the IC device 
10
 thereon so that the IC device is provided with heat. Then the IC device 
10
 heated in the heater area 
27
 is again picked up by the suction pad 
16
 and moved to the IC socket 
40
 on the test head 
50
 to connect the lead pins of the I
Advantest Corp.
Hollington Jermele M.
Metjahic Safet
Muramatsu & Associates
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