Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2008-10-09
2011-11-22
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S075000
Reexamination Certificate
active
08064045
ABSTRACT:
The invention relates to a method of transferring a substrate from a first substrate holder to a second substrate holder in a lithographic projection apparatus by using a transfer unit on the basis of transfer data available thereto. The second substrate holder has a surface provided with a first plurality of burls. In the method, a memory encoded with burl position data and substrate position data is provided. Subsequently, a substrate is provided on the first substrate holder. The position error and orientation of the substrate is then measured. On the basis of the burl position data, substrate position data and orientation as measured orientation adjustment data are calculated. The orientation of the substrate is subsequently adjusted in accordance with the orientation adjustment data. The substrate is then transferred from the first substrate holder to the second substrate holder by the transfer unit and placed on the second substrate holder.
REFERENCES:
patent: 6707528 (2004-03-01), Aoyama et al.
patent: 6795164 (2004-09-01), Hoogenraad et al.
patent: 6860533 (2005-03-01), Lee et al.
patent: 7110085 (2006-09-01), Zaal et al.
patent: 7139638 (2006-11-01), Nakajima et al.
patent: 7374957 (2008-05-01), Oesterholt
patent: 7564536 (2009-07-01), Ottens et al.
patent: 7583357 (2009-09-01), Donders et al.
patent: 7706907 (2010-04-01), Hiroki
patent: 2006/0010710 (2006-01-01), Park et al.
patent: 2009/0180095 (2009-07-01), Alberti et al.
patent: 2010/0265488 (2010-10-01), Alberti et al.
patent: 1550912 (2004-12-01), None
patent: 11-330206 (1999-11-01), None
patent: 2001-127144 (2001-05-01), None
patent: 2003-152053 (2003-05-01), None
patent: 2003-168719 (2003-06-01), None
patent: 2006-140498 (2006-06-01), None
patent: 2007-027718 (2007-02-01), None
English Language Abstract for CN 1550912 A, published Dec. 1, 2004; 1 page.
English Language Translation of Chinese Office Action for related Chinese application No. 200810191102.0, issued on Oct. 12, 2010; 2 pages.
U.S. Office Action mailed on Jan. 25, 2011, directed to co-pending U.S. Appl. No. 12/248,586, filed Oct. 9, 2008; 12 pages.
English language Abstract of Japanese Patent Publication No. 11-330206 A, published Nov. 30, 1999; 1 page.
English language Abstract of Japanese Patent Publication No. 2001-127144 A, published May 11, 2001; 1 page.
English language Abstract of Japanese Patent Publication No. 2003-152053 A, published May 23, 2003; 1 page.
English language Abstract of Japanese Patent Publication No. 2003-168719 A, published Jun. 13, 2003; 1 page.
English language Abstract of Japanese Patent Publication No. 2006-140498 A, published Jun. 1, 2006; 1 page.
English language Abstract of Japanese Patent Publication No. 2007-027718 A, published Feb. 1, 2007; 1 page.
English translation of Japanese Notice of Reasons for Rejection directed to related Japanese Application No. 2008-262677, the Japanese Patent Office, mailed May 30, 2011; 3 pages.
English translation of Japanese Notice of Reasons for Rejection directed to related Japanese Application No. 2008-264460, the Japansese Patent Office, May 30, 2011; 4 pages.
U.S. Final Office Action directed to co-pending U.S. Appl. No. 12/248,586, filed Oct. 9, 2008, mailed Jul. 11, 2011; 16 pages.
Non-Final Rejection mailed Jul. 25, 2011, directed to co-pending U.S. Appl. No. 12/784,763, filed May 21, 2010; 10 pages.
Alberti Jozef Augustinus Maria
Compen Rene Theodorus Petrus
Groensmit Frans Erik
Van Nunen Gerardus Petrus Matthijs
ASML Netherlands B.V.
Nguyen Hung Henry
Sterne Kessler Goldstein & Fox P.L.L.C.
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