Method of thermal processing a substrate with direct and...

Details Method of thermal processing a substrate with direct and... Method of thermal processing a substrate with direct and...

2008-07-15

2008-07-15

Evans, Geoffrey S (Department: 1793)

Electric heating

Metal heating

By arc

C219S121740, C219S121800, C438S487000

Reexamination Certificate

active

11592770

ABSTRACT:
Apparatus and methods for thermally processing a substrate with scanned laser radiation are disclosed. The apparatus includes a continuous radiation source and an optical system that forms an image on a substrate. The image is scanned relative to the substrate surface so that each point in the process region receives a pulse of radiation sufficient to thermally process the region.

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