Method of thermal isolation of detector elements in an uncooled

Details Method of thermal isolation of detector elements in an uncooled Method of thermal isolation of detector elements in an uncooled

1989-03-07

1990-05-22

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 5, 437 49, 437 50, 437 67, 437185, 437225, 437228, 437974, 357 32, 250332, H01L 27144

Patent

active

049277715

ABSTRACT:
A method of thermally isolating detector elements in an uncooled focal pl array. A backfill material of arsenic trisulfide is deposited inside reticulated grooves in a detector material to provide strength prior to the step of bump bonding the detector elements of the detector material to a readout device array. After the bump bonding step, an oxygen rich gas, such as a dry oxygen and nitrogen mixture, is flowed between the detector and readout arrays to remove the arsenic trisulfide material therefrom leaving an air gap between the detector elements.

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