Measuring and testing – Dynamometers – Responsive to force
Patent
1994-08-31
1996-03-12
Chilcot, Richard
Measuring and testing
Dynamometers
Responsive to force
7351432, G01L 104
Patent
active
054976685
ABSTRACT:
A fixed substrate (10) having rigidity and a flexible substrate (20) having flexibility are arranged in such a manner that they are opposite to each other. Both the substrates are fixed at their peripheral portions by a detector casing (40). A working body (30) is connected onto the lower surface of the flexible substrate. Test electrodes (11t, 13t, 15t) are formed on the lower surface of the fixed substrate, and fixed electrodes (11, 13, 15) are further formed through an insulating layer (16). Displacement electrodes (21, 23, 25) are formed on the upper surface of the flexible substrate. When an acceleration is exerted on the working body, the flexible substrate is bent, so the distance between the fixed electrode and the displacement electrode is varied. By detecting the change of distance as a change of the electrostatic capacitance between both the electrodes, it is possible to detect an acceleration exerted. In order to carry out the operation test of this detector, a voltage is applied across the test electrode and the displacement electrode, thus allowing coulomb force to be exerted between both the electrodes. Thus, the flexible substrate is bent by coulomb force, resulting in the same state as the state where an acceleration is exerted. By examining a change of the electrostatic capacitance between the fixed electrode and the displacement electrode, the operation test can be conducted.
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H. U. Allen, et al. Beschleunigungsmesser Mit Selbsttest, p. 31, left column, para. 3, right col. last page-p. 32 middle col. para 2, right col, last page; Figs. 3, 4, 8, und-oder-Nor-Steverungstechnik, vol. 23, No. 3, Mar. 1990, Mainz DE, pp. 30-33.
Biegel Ronald
Chilcot Richard
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