Method of testing semiconductor wafers

Details Method of testing semiconductor wafers Method of testing semiconductor wafers

1987-11-24

1989-10-17

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Plural, automatically sequential tests

324 73AT, 324158R, 364552, G01R 3128, G06F 1520

Patent

active

048750026

ABSTRACT:
Semiconductor wafers are tested more efficiently with an improved throughput. Since a plurality of test items are involved but some tests discover more defects than the others, and since neighboring wafers may be believed to have similar characteristics regarding defects, a spot-checking routine and a preferred sequence in which the plurality of tests are conducted may be selected from the data collected and stored from a preliminary testing so that defective samples are more efficiently identified.

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