Method of testing semiconductor pressure sensor

Details Method of testing semiconductor pressure sensor Method of testing semiconductor pressure sensor

1987-10-21

1989-05-02

Tokar, Michael J.

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

G01L 2700

Patent

active

048256846

ABSTRACT:
A method of measuring a semiconductor pressure sensor comprises the steps of mounting a wafer formed with diaphragm type semiconductor pressure sensors on a wafer stage, evacuating air existing between the back surface side of said diaphragm type semiconductor pressure sensors and said wafer stage through at least one hole provided in said wafer stage to deform diaphragms of said semiconductor pressure sensors, and measuring the pressure sensitivity of each of said semiconductor pressure sensors from the surface side of said semiconductor pressure sensors.

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