Method of testing semiconductor elements and apparatus for testi

Details Method of testing semiconductor elements and apparatus for testi Method of testing semiconductor elements and apparatus for testi

1990-01-23

1991-07-09

Wieder, Kenneth

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, 324158T, G01R 3102

Patent

active

050309080

ABSTRACT:
A method and an apparatus for measuring and testing an electric characteristic of a semiconductor device in a non-contact fashion by using an electron beam to induce a voltage on the semiconductor device. By examination of changes with a lapse of time of the induced voltage, the electric characteristics of the semiconductor device are determined.

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Hohn, "Background and Applications of Electron Beam Test Techniques", 8226 Microelectronic Engineering, 4 (1986) Dec., No. 2, Amsterdam, The Netherlands, pp. 139-157.

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