Method of testing semiconductor elements

Details Method of testing semiconductor elements Method of testing semiconductor elements

1988-09-23

1990-03-27

Hearn, Brian E.

Fishing, trapping, and vermin destroying

324158R, H01L 2166, G01R 1900

Patent

active

049120522

ABSTRACT:
This invention concerns a method and an apparatus for measuring and testing the electric characteristic of a semiconductor device in a non-contact fashion. For conducting measurement and testing in a non-contact fashion, an electron beam is used to induce a voltage, on a semiconductor device which is an object to be tested (an object to be measured.) By changes with lapse of time of the induced voltage, the electric characteristic, of the semiconductor device are determined. Thus, an electron beam is irradiated to an object to be tested to induce a voltage thereafter to examine changes in the induced voltage. Then, the electric characteristic of the semiconductor device is measured and tested from the voltage thus induced and the voltage measured thereafter.

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