Method of testing semiconductor devices

Details Method of testing semiconductor devices Method of testing semiconductor devices

1977-04-25

1978-09-12

Rolinec, Rudolph V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, 324158T, G01R 3122

Patent

active

041140966

ABSTRACT:
A method of testing semiconductor devices at low temperatures comprises the steps of first directing a relatively cold fluid upon the device for a time long enough to reduce the temperature thereof below the temperature at which it is to be tested, then internally heating the device to the test temperature and then performing a test at the testing temperature.

REFERENCES:
patent: 3659199 (1972-04-01), Knutson
patent: 3665307 (1972-05-01), Cocca
patent: 3710251 (1973-01-01), Hagge et al.
patent: 3761808 (1973-09-01), Ryan

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