Method of surface treatment

Details Method of surface treatment Method of surface treatment

1985-12-10

1988-06-07

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 47, 427294, B05D 306

Patent

active

047495898

ABSTRACT:
In a pulsed plasma process for surface treatment of a substrate the containing reactor vessel (11) has an inner cross-section conforming to the substrate geometry so as to confine the intense plasma region to the substrate surface (12). Preferably this region should be within 15 to 20 mm of the surface. Advantageously the inner surface is provided by a demountable insert (13).

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