Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1997-03-07
1998-05-26
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
With light attenuation
356373, G01B 1130
Patent
active
057574960
ABSTRACT:
A method of surface roughness measurement is disclosed which uses a fiber-optic probe having a sensor head constituted of a light-emitting fiber and multiple light-receiving fibers disposed coaxially with the light-emitting fiber. The surface roughness measurement includes the steps of: (a) pre-measuring a first correlation between detected intensity and gap distance for each of reference samples obtained under a plurality of different processing conditions; (b) searching a second correlation between maximum intensity and surface roughness for each of the reference samples, based on the first correlation, and storing the second correlation in memory; (c) adjusting the gap distance so as to set the probe in a position at which the maximum intensity is obtained for the reference sample machined under the processing condition to be monitored; and (d) monitoring the maximum intensity of the machined surface at the gap distance set in step (c), and determining the roughness of the machined surface based on the second correlation.
REFERENCES:
patent: 4254331 (1981-03-01), Dorman et al.
patent: 4674882 (1987-06-01), Dorman et al.
patent: 4692611 (1987-09-01), Hoogenboom
patent: 5410410 (1995-04-01), Yamazaki et al.
patent: 5410413 (1995-04-01), Sela
patent: 5453838 (1995-09-01), Danielian et al.
"The fiber-optic instrument for extremely small roughness measurement", A. Domanski et al., SPIE vol. 670 Optical Fibres and Their Applications IV (1986), pp. 116-118.
"A novel non-contact sensor for surface topography measurement using a fibre optic principle", Clive Butler and Gregorios Gregoriou, Sensors and Actuators A. 31 (1992), pp. 68-74.
"The method of surface roughness measurement with application of optical fibers", Andrzej W. Domanski et al., SPIE vol. 670 Optical Fibres and Their Applications IV (1986), pp. 119-112.
Mitutoyo Corporation
Pham Hoa Q.
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