Method of supporting and/or conveying a plate with fluid without

Details Method of supporting and/or conveying a plate with fluid without Method of supporting and/or conveying a plate with fluid without

1986-04-24

1988-04-05

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

By positive fluid stream directed against article

B25J 1506

Patent

active

047354496

ABSTRACT:
An improved method and apparatus are presented for supporting and/or conveying a plate by means of flow of fluid without physical contact. By providing a flat surface extending perpendicularly from the opening of a fluid delivery pipe and providing a suction pipe around the flat surface, static pressure of fluid becomes negative at the gap between the flat surface and a plate near the flat surface, to support and/or convey the plate beneath the flat surface without physical contact. The fluid delivered into the gap between the flat surface and plate is inhaled into the suction pipe and recirculated, to prevent the disturbance of the surrounding atmosphere by the fluid, the attachment of dust onto the plate and the introduction of dust into the fluid. This method is effective for handling of plates, such as semi-conductor wafers and magnetic discs, which should not be marred or stained by physical contact with a hand or a gripper.

REFERENCES:
patent: 3005652 (1961-10-01), Helm
patent: 3223443 (1965-12-01), Misson
patent: 3466079 (1969-09-01), Mammel
patent: 3517958 (1970-06-01), Boucher et al.
patent: 3523706 (1970-08-01), Logue
patent: 3796455 (1974-03-01), Linkbom
EP 86 30 3061 European Search Report.
IBM Technical Disclosure Bulletin, vol. 11, No. 2, Jul. 1968, "Wafer Pickup with Air Barrier" by Hayunga.
IBM Techinical Disclosure Bulletin, vol. 22, No. 8A, Jan. 1980, "Self-Centering Non-Contact Pick-Up" by Coles.
IBM Technical Disclosure Bulletin, vol. 23, No. 5, Oct. 1980, "Pickup Head for Apertured flat Members" by Haney et al.

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