Method of supporting and adjusting optical element in...

Details Method of supporting and adjusting optical element in... Method of supporting and adjusting optical element in...

2006-11-14

2006-11-14

Amari, Alessandro (Department: 2872)

Optical: systems and elements

Lens

With support

C359S871000

Reexamination Certificate

active

07136238

ABSTRACT:
Disclosed is a supporting structure for supporting an optical element in an optical system, particularly for use in a semiconductor exposure apparatus. The supporting structure includes a first holding member having at least two supporting portions for supporting a peripheral portion of the optical system, and a second holding member for supporting the optical element, wherein the second holding member is connected to the first holding member, between the at least two supporting portions of the first holding member, through an elastic member.

REFERENCES:
patent: 6086209 (2000-07-01), Miyahara et al.
patent: 6307688 (2001-10-01), Merz et al.
patent: 6400516 (2002-06-01), Spinali

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