Method of sucking water and water sucking device

Details Method of sucking water and water sucking device Method of sucking water and water sucking device

2007-04-10

2007-04-10

Hail, III, Joseph J. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S057000, C451S285000, C451S286000, C451S287000, C451S288000, C451S289000

Reexamination Certificate

active

11093426

ABSTRACT:
The method of sucking water is capable of easily removing excess water included in a backing member adhered on a plate of a polishing apparatus. In the method, the excess water is removed from the backing member by the steps of: pressing a water absorbing member onto a holding surface of the backing member, on which the work piece is adhered and held, so as to absorb the excess water from the backing member; and sucking the excess water absorbed by the water absorbing member.

REFERENCES:
patent: 4193226 (1980-03-01), Gill et al.
patent: 4521995 (1985-06-01), Sekiya
patent: 5618354 (1997-04-01), Lofaro
patent: 5908347 (1999-06-01), Nakajima et al.
patent: 6193586 (2001-02-01), Park et al.
patent: 56-164549 (1981-12-01), None
patent: 2003-11056 (2003-01-01), None

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