Method of starting and/or regenerating a cryopump and a cryopump

Details Method of starting and/or regenerating a cryopump and a cryopump Method of starting and/or regenerating a cryopump and a cryopump

1985-10-18

1986-09-30

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62100, 62268, 417901, B01D 800

Patent

active

046140930

ABSTRACT:
A cryopump has a two-stage refrigerator in a housing with a pumping surface area in thermal communication with each stage of the refrigerator for gas-pumping by adsorption or absorption when the refrigerator is operated. A roughing vacuum pump provides a pressure of from about 1 to about 10.sup.-3 mbar to the housing and at least the pumping surface area of the second refrigerator stage is heated sufficiently to prevent gas adsorption or absorption thereon before the cryopump is operatively connected to a space to be evacuated therewith as a starting method for improving the cryopumping of, particularly, helium and a regenerating method after use of the cryopump.

REFERENCES:
patent: 3585807 (1971-06-01), Hengevoss
patent: 4121430 (1978-10-01), Bachler
patent: 4150549 (1979-04-01), Longsworth
patent: 4283948 (1981-10-01), Welch
patent: 4356701 (1982-11-01), Bartlett et al.
patent: 4363217 (1982-12-01), Venuti
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4454722 (1984-06-01), Bartlett et al.
patent: 4546613 (1985-10-01), Eacobacci et al.

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