Method of stabilizing a mask

Details Method of stabilizing a mask Method of stabilizing a mask

1986-11-13

1988-10-04

Anderson, Bruce C.

Radiant energy

Radiant energy generation and sources

With radiation modifying member

2505051, G01J 100

Patent

active

047757973

ABSTRACT:
Our invention is a process for stabilizing a projection mask which is put in operation at an elevated temperature. The frame containing the mask foil is heated to a temperature which is higher than the temperature of the mask foil. The mask foil is thus kept under tension by controlling the temperature of the frame it is held in and distortions like the distortions which would otherwise occur in long time operation and as conditioned by the mask foil hanging through it are avoided. The effect of the expansion of the mask foil can be compensated in the image forming unit by correction of the image formation scale.

REFERENCES:
patent: 4112307 (1978-09-01), Foll et al.
patent: 4307556 (1983-01-01), Stengl et al.

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