Coating processes – Centrifugal force utilized
Patent
1990-09-21
1991-08-06
Beck, Shrive
Coating processes
Centrifugal force utilized
427346, 4273855, B05D 312
Patent
active
050376730
ABSTRACT:
In humid atmospheres (e.g., 55% relative humidity or above) solutions of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyamic acid polymers tend to be unstable in the sense that during spin coating operations undesirable precipitate formation may occur on the rotating surface of a semiconductor wafer. The result is the formation of unacceptable coatings due to their irregularity and lack of uniformity. Described is a method of spin coating solutions of these polyamic acid polymers in a solvent containing one or more cycloaliphatic ketones, such that the solution (a) contains on a weight basis from about 5% to about 40% of the polyamic acid and (b) does not undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity.
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Blocker Wesley C.
Eisenbraun Allan A.
Beck Shrive
Ethyl Corporation
Hansen Richard L.
Sieberth John F.
Utech Benjamin L.
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