Method of simulating semiconductor manufacture with process func

Details Method of simulating semiconductor manufacture with process func Method of simulating semiconductor manufacture with process func

1995-11-01

1998-12-01

Teska, Kevin J.

G06F 9455

Patent

active

058451056

ABSTRACT:
A method of manufacturing a semiconductor device wherein the device is manufactured according to extracted process parameters. The process parameters are extracted as a set of optimum process parameters which satisfy an intended specification using process functions. The process functions describe a characteristic of the semiconductor device, and are determined using experimental values and/or simulated values. The process parameters may then be transmitted online to a factory.

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