Method of silica optical fiber preform production

Details Method of silica optical fiber preform production Method of silica optical fiber preform production

2006-01-24

2006-01-24

Griffin, Steven P. (Department: 1731)

Glass manufacturing

Processes of manufacturing fibers, filaments, or preforms

Process of manufacturing optical fibers, waveguides, or...

C065S421000, C065S425000, C427S163200

Reexamination Certificate

active

06988380

ABSTRACT:
A method is disclosed for the manufacture of optical fiber preforms using plasma enhanced chemical vapor deposition (PECVD). The invention consists of a cylindrical reactor in which material such as flourine-doped silica glass is deposited on a cylindrical silica rod. A furnace for regulating reactor temperature encases the reactor. A microwave generator coupled with a resonator and an H10waveguide delivers microwave energy to the reactor, producing simultaneously symmetrical excitations in the E010mode and a plasma surface wave in E01mode located at the surface of the rod. A microwave plasma is scanned along the length of the rod through a slit in the reactor to deposit a homogeneous film of a desired thickness. The benefits of the present invention over the prior art include increased absorption of delivered power, and the ability to uniformly deposit films such as flourine-doped silica on rods with diameters of up to 30–35 mm and thus produce optical fiber preforms with diameters greater than 40 mm.

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Dianov et al., “Low-Hydrogen Silicon Oxynitride Optical Fibers Prepared by SPCVD,” Journal of Lightwave Technology, vol. 13, No. 7, Jul. 1995, p. 1471-1474.
Noguchi et al., “Loss Increase for Optical Fibers Exposed to Hydrogen Atmosphere,” Journal of LightWave Technology, vol. LT-3, No. 2, p. 236-243.

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