Method of separating micro-devices formed on a substrate

Details Method of separating micro-devices formed on a substrate Method of separating micro-devices formed on a substrate

1996-08-13

1998-11-10

Hughes, S. Thomas

Metal working

Method of mechanical manufacture

Utilizing transitory attached element or associated separate...

29412, 438114, 438465, 125 1602, 451 53, B23P 1700, H01L 2178

Patent

active

058325859

ABSTRACT:
A method of separating a plurality of micro-devices from one another which are formed in a predetermined pattern on a single substrate is disclosed herein. Each micro-device includes at least one predetermined area to be protected from process debris during the separating process. The method includes the step of first coating the micro-devices with a water soluble material such that at least the predetermined area is covered. Following coating, the micro-devices are separated from one another such that the water soluble material continues to cover the predetermined area. Next, the micro-devices and the water soluble material are exposed to water which substantially removes the water soluble material from the predetermined area without harming the micro-devices such that contamination of the predetermined area by the process debris is prevented during the separating step.

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