Method of separately determining plug resistor and interfacial r

Details Method of separately determining plug resistor and interfacial r Method of separately determining plug resistor and interfacial r

1995-10-11

1997-09-02

Wieder, Kenneth A.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324719, G01R 2708

Patent

active

056636512

ABSTRACT:
The present invention provides a test pattern and method for separately measuring a plug resistance and interfacial resistance of a contact resistance with high precision including the steps of: (a) providing on a semiconductor chip a test pattern as described above; (b) applying a predetermined voltage between the electrode pad patterns of one of a pair of first and second electrode pad patterns and a pair of third and fourth electrode pad patterns and measuring a current flowing between the electrode pad patterns of the one pair in an open state between the electrode pad patterns of the other pair; (c) repeating this measuring method between the electrode pad patterns of each pair; and (d) determining a first plug resistance of the first or fourth contact hole and a second plug resistance of the second or third contact hole from the voltage and the first to third currents.

REFERENCES:
patent: 5450016 (1995-09-01), Masumori

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