Method of sensing a chemical and sensor therefor

Details Method of sensing a chemical and sensor therefor Method of sensing a chemical and sensor therefor

1996-02-28

1997-11-04

Bell, Bruce F.

Electrolysis: processes, compositions used therein, and methods

Electrolytic analysis or testing

For corrosion

204416, 257253, 257467, 257469, 422 8201, 422 8202, 422 8203, 436149, 436150, 436151, 436153, G01N 2726

Patent

active

056835698

ABSTRACT:
A sensor (10) includes a gate electrode (20) overlying a channel region (34). A gap (22) between the gate electrode (20) and the channel region (34) allows a surface (28) of the gate electrode (20) to be exposed to a chemical. Upon exposure to the chemical, a surface potential or an electrical impedance of the gate electrode (20) may change. Comparing the changes in surface potential versus the changes in electrical impedance provides a method to distinguish between similar chemical species and also to extend the detection range of the sensor (10).

REFERENCES:
patent: 3999122 (1976-12-01), Winstel et al.
patent: 4514263 (1985-04-01), Janata
patent: 5386715 (1995-02-01), Evans et al.
patent: 5576563 (1996-11-01), Chung
Wilson et al., Review of Physical Instruments, "Field-Effect Probe for Work Function Measurements", May 1989, pp. 886-887.
Lundstrom et al., Applied Physics Letters, "A Hydrogen-Sensitive MOS Field-Effect Transistor", Jan. 15, 1975, vol. 26, No. 2, pp. 55-57.

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