Method of semiconductor process and semiconductor apparatus...

Details Method of semiconductor process and semiconductor apparatus... Method of semiconductor process and semiconductor apparatus...

2007-10-02

2010-10-05

Wilson, Gregory A (Department: 3749)

Heating

Processes of heating or heater operation

Including preparing or arranging work for heating

C432S247000, C414S936000

Reexamination Certificate

active

07806684

ABSTRACT:
A method of a semiconductor process is provided. The semiconductor process at least includes a first high temperature furnace process and a second high temperature furnace process. In the method, the first high temperature furnace process is performed on a first wafer boat carrying at least a wafer. Then, the second high temperature furnace process is performed on a second wafer boat carrying at least the same wafer. In addition, before the second high temperature furnace process is implemented, a moving step is performed, such that a relative position of the wafer in the first wafer boat is different from that of the wafer in the second wafer boat.

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