Method of selectively forming an insulation layer

Details Method of selectively forming an insulation layer Method of selectively forming an insulation layer

1985-05-20

1986-06-17

Newsome, John H.

Coating processes

Electrical product produced

Welding electrode

427 541, 427 93, 427 94, B05D 306

Patent

active

045956014

ABSTRACT:
An insulation layer is selectively formed by exposing the surface of a workpiece to an atmosphere comprising a mixture of a halogen-based gas and a raw gas containing a compoundable element chemically bondable with an element of a material constituting surface layer of the workpiece to form an insulating compound. The surface layer of the workpiece is formed of a non-insulating material, such as a metallic material or a semiconductor material. Light rays are directly irradiated on the selected region or regions of the surface of the workpiece through the atmosphere of the gaseous mixture, thereby dissociating said halogen-based gas. As a result, a layer comprising the insulating compound is formed on the selected region of the surface of the workpiece on which the light rays have been directly irradiated.

REFERENCES:
patent: 3364087 (1968-01-01), Solomon et al.
patent: 4298629 (1981-11-01), Nozaki et al.
patent: 4495218 (1985-01-01), Azuma et al.
patent: 4539221 (1985-09-01), Jacob et al.

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