Fishing – trapping – and vermin destroying
Patent
1992-04-10
1994-03-15
Thomas, Tom
Fishing, trapping, and vermin destroying
437239, 437243, 437946, 148DIG17, 148DIG51, 156646, 156654, 156662, H01L 2102
Patent
active
052945685
ABSTRACT:
A method of selective etching of native oxide on a substrate is disclosed in which hydrogen halide vapor and water vapor are exposed to the substrate surface under appropriate conditions and long enough to remove native oxide but not long enough to remove any significant amount of other oxides. Treating conditions are maintained to prevent water vapor from condensing on the substrate until sufficient native oxide is etched so that substantially all the native oxide will be etched before appreciable other oxides are etched.
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de Larios John
Deal Bruce E.
Kao Dah-Bin
McNeilly Michael A.
Boys Donald R.
Dang Trung
Genus Inc.
Smith Joseph H.
Thomas Tom
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