Method of selected area doping of compound semiconductors

Metal working – Method of mechanical manufacture – Assembling or joining

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

148175, 148 15, 156612, 357 91, H01L 21203, C23C 1308

Patent

active

044701926

ABSTRACT:
A method is provided for selectively doping a compound semiconductor such as GaAs in situ by molecular beam epitaxy. The surface of the GaAs is coated with a thin layer of As by exposing it to an arsenic flux within a molecular beam epitaxy chamber. Selected areas of the surface are irradiated with a laser beam or a beam of photons, electrons, or ions in order to desorb As and form a mask of As on the surface. Dopant material such as tin is then deposited over the surface and As mask. The semiconductor is then heated to desorb the As mask while leaving the dopant in the unmasked areas. An epitaxial layer of GaAs is then grown over the surface by molecular beam epitaxy.

REFERENCES:
patent: 4071383 (1978-01-01), Nagata et al.
patent: 4086108 (1978-04-01), Gonda
patent: 4242149 (1980-12-01), King et al.
patent: 4261771 (1981-04-01), Dingle et al.
patent: 4312681 (1982-01-01), Rupprecht et al.
patent: 4383872 (1983-05-01), Roberts
patent: 4392453 (1983-07-01), Luscher
Neave et al., Jour. Crystal Growth, 44 (1978) 387.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method of selected area doping of compound semiconductors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of selected area doping of compound semiconductors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of selected area doping of compound semiconductors will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1188817

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.