Method of secondary ion mass spectrometry analysis

Details Method of secondary ion mass spectrometry analysis Method of secondary ion mass spectrometry analysis

1991-09-06

1993-05-04

Berman, Jack I.

Radiant energy

Ionic separation or analysis

Methods

250306, 250309, 250397, G01N 2300

Patent

active

052084574

ABSTRACT:
A method of secondary ion mass spectrometry analysis has been improved to make detection of the positive and the negative secondary ions within a short period of time and with a high sensitivity. This improved method utilizes an accelerated primary ion of a cesium oxide for selective irradiation to a specific region in the test specimen to sputter the specimen surface and to make a mass spectrometry analysis of emitted positive and negative secondary ions. In detecting the positive and the negative secondary ions, it is possible to change the polarity of one ion current detection electrode of a secondary ion mass spectrometer in turn or to use two ion current detection electrodes connected to a secondary ion mass spectrometer and applied to a positive and a negative potential, respectively.

REFERENCES:
patent: 4694170 (1987-09-01), Slodzian et al.
patent: 4740697 (1988-04-01), Suzuki

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