Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1991-05-29
1992-03-10
Wieder, Kenneth A.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 324158T, 371 225, 437 8, G01R 3100, G01R 3102
Patent
active
050952676
ABSTRACT:
A method of characterizing A.C. performance of an integrated circuit based upon D.C. measurements utilizing a process monitor circuit. The process monitor circuit provides a D.C. output having a magnitude which varies with the frequency of an oscillator section of the monitor circuit. The frequency is a function of both A.C. and D.C. performance, therefore the process monitor output signal is indicative of such performance. Since D.C. measurements may be made while the integrated circuits are in wafer form utilizing a conventional wafer prober and parametric tester, it is possible to detect A.C. performance problems very early in the manufacturing process.
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Gomersall Edson D.
Issaq Enayet O.
Merrill Richard B.
Burns William J.
National Semiconductor Corporation
Wieder Kenneth A.
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