Method of screening A.C. performance characteristics during D.C.

Details Method of screening A.C. performance characteristics during D.C. Method of screening A.C. performance characteristics during D.C.

1990-03-19

1991-08-13

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 7, 437 51, H01L 2166

Patent

active

050396021

ABSTRACT:
A method of characterizing A.C. performance of an integrated circuit based upon D.C. measurements utilizing a process monitor circuit. The process monitor circuit provides a D.C. output having a magnitude which varies with the frequency of an oscillator section of the monitor circuit. The frequency is a function of both A.C. and D.C. performance, therefore the process monitor output signal is indicative of such performance. Since D.C. measurements may be made while the integrated circuits are in wafer form utilizing a conventional wafer prober and parametric tester, it is possible to detect A.C. performance problems very early in the manufacturing process.

REFERENCES:
patent: 3781670 (1973-12-01), McMahon, Jr.
patent: 3922707 (1975-11-01), Freed et al.
patent: 4045736 (1977-08-01), Carpenter et al.
patent: 4606025 (1986-08-01), Peters et al.
patent: 4801875 (1989-01-01), Ige

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