Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1995-03-24
1997-04-08
Epps, Georgia Y.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356349, 356432, G01B 902
Patent
active
056193262
ABSTRACT:
A sample evaluation method based on the measurement of photothermal displacement in which two exciting light beams and two measuring light beams are produced by a laser source, the exciting beams are rendered intensity modulation in opposite phase relationship by an acoustic-optic modulator and illuminated to different positions of a sample, the measuring beams are provided with different oscillation frequencies by acoustic-optic modulators and illuminated to the irradiation positions of the exciting beams correspondingly, the reflected lights of measuring beams from the sample are merged so as to interfere with each other, and the sample is evaluated based on the phase of the interference light. The method is capable of measuring the photothermal displacement accurately and stably without implementing intricate signal processings.
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patent: 5377006 (1994-12-01), Nakata
patent: 5479259 (1995-12-01), Nakata et al.
Huang et al, "Dual-Probe Interferometer", Sep. 1991, Journal of Acoustical Society of America, pp. 1269-1274.
Applied Optics, vol. 22, No. 18, Sep. 15, 1983, pp. 2882-2886, L. C. M. Miranda, "Photodisplacement Spectroscopy of Solids: Theory".
Morimoto Tsutomu
Sumie Shingo
Takamatsu Hiroyuki
Yoshida Naoyuki
Epps Georgia Y.
Kabushiki Kaisha Kobe Seiko Sho
Kim Robert
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