Method of resetting substrate processing apparatus, storage...

Details Method of resetting substrate processing apparatus, storage... Method of resetting substrate processing apparatus, storage...

2007-06-12

2007-06-12

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

Reexamination Certificate

active

11270775

ABSTRACT:
A method of resetting a substrate processing apparatus having a chamber which is capable of carrying out abnormality judgment on the substrate processing apparatus accurately without causing a decrease in the utilization ratio of the substrate processing apparatus. The chamber is evacuated. A temperature in the chamber is set. Whether or not there is an abnormality in the chamber is judged. An atmosphere in the chamber is stabilized so as to conform to predetermined processing conditions. At least one selected from data that change in response to a change in a state inside the chamber is measured. The measured data is compared with reference data that corresponds to the measured data for a normal state in the chamber.

REFERENCES:
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patent: 7054786 (2006-05-01), Sakano et al.
patent: 2003/0045098 (2003-03-01), Verhaverbeke et al.
patent: 2004/0254761 (2004-12-01), Sakano et al.
patent: 2002-18274 (2002-01-01), None
patent: 2002-018274 (2002-01-01), None

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