Method of replacing an image sensor array

Details Method of replacing an image sensor array Method of replacing an image sensor array

1987-04-16

1989-05-16

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 8, 437923, 437 51, 437 53, 29833, 2940208, 357 55, 357 60, 358285, 156647, H01L 21306

Patent

active

048309850

ABSTRACT:
An image sensor array and method of fabrication which facilitates replacement of a defective one in a series of arrays butted together to form a longer scanning array in which a (110) silicon wafer having a row of photosites has separation lines etched thereon by orientation dependent etching along the (111) planes, with the separation lines for the opposite ends of the array each consisting of first and second partial boundary lines longitudinally offset from one another connected by a third boundary line so that the ends of the array have a has a generally L-shaped offset permitting bi-directional separating and aligned inserting movement when replacing a defective array.
In a second embodiment, the arrays are formed on (100) silicon with alternating `nail` head and `mesa` head shapes to facilitate removal and replacement of a defective array.

REFERENCES:
patent: 4179318 (1979-12-01), Kaplow et al.
patent: 4668333 (1987-05-01), Tandon et al.
patent: 4672314 (1987-06-01), Kokkas
patent: 4698131 (1987-10-01), Araghi et al.

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