Method of repairing surface defects in coated laser mirrors

Details Method of repairing surface defects in coated laser mirrors Method of repairing surface defects in coated laser mirrors

1981-08-31

1983-06-14

Smith, John D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

350310, 427140, 427142, 427 39, 427162, 427166, 427167, G02B 110, G02B 508

Patent

active

043883443

ABSTRACT:
A method of repairing an intermediate amorphous silicon and/or germanium bond coat on a laser mirror substrate is described. The initial coating is put down by polishing the mirror substrate followed by depositing a layer of amorphous silicon, amorphous germanium, or mixtures thereof on the mirror surface, and polishing the thus coated mirror surface to a substantially void-free surface finish. A layer of oxide of silicon or germanium is deposited on the thus formed coating either during, after, or in sandwich fashion during the formation of such intermediate bond coat. The intermediate coating can be surface polished back to the original amorphous layer or the oxide can remain on the surface after polishing.

REFERENCES:
patent: 4191788 (1980-03-01), Harrington
patent: 4289797 (1981-09-01), Akselrad
Rosler, "Plasma Enhanced CVD in a Novel LPCVD-Type System" Solid State Technology, vol. 24, No. 4, Apr. 1981, pp. 172-177.

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