Method of repairing micromirrors in spatial light modulators

Details Method of repairing micromirrors in spatial light modulators Method of repairing micromirrors in spatial light modulators

2008-05-20

2008-05-20

Stultz, Jessica T (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100, C359S295000

Reexamination Certificate

active

11069408

ABSTRACT:
Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.

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