Method of repairing apertured laser metal mask

Details Method of repairing apertured laser metal mask Method of repairing apertured laser metal mask

1995-05-22

1996-07-16

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430321, 427140, 427148, 228119, 2281791, 216 51, 216 65, G03F 900

Patent

active

055366058

ABSTRACT:
A repaired laser ablation mask is disclosed capable of withstanding laser fluences in the range from about 200 mJ/cm.sup.2 to at least 500 mJ/cm.sup.2. The repaired mask comprises a single or multiple layers of apertured metal, such as, aluminum, on a quartz substrate. The laser mask repair technique and structure are also disclosed. The thickness of the metal layer, such as, aluminum layer, is in the range from about 2 microns to about 6 microns. A laser projection etching technique is also disclosed for using the repaired ablation mask.

REFERENCES:
patent: 4636403 (1987-01-01), Fisanick et al.
patent: 4704304 (1987-11-01), Amendola et al.
patent: 4786358 (1988-11-01), Yamazaki et al.
patent: 4923772 (1990-05-01), Kirch et al.
patent: 5193732 (1993-03-01), Interrante et al.
patent: 5289632 (1994-03-01), Chalco et al.
patent: 5349155 (1994-09-01), Yamagishi et al.
"Metal Film/Diamond Membrane Mask for Excimer Laser Ablation Projection Etching", IBM Technical Disclosure Bulletin, vol. 36, No. 11, pp. 583-584, Nov. 1993.
U.S. patent application Ser. No. 08/410,030, filed on Mar. 24, 1995, entitled "Single Metal Mask for Laser Ablation".

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