Method of repairing a defective photomask

Details Method of repairing a defective photomask Method of repairing a defective photomask

1985-04-29

1987-01-13

Page, Thurman K.

Coating processes

Electrical product produced

Welding electrode

427140, 427142, 430 5, 430945, B05D 306, B32B 3500

Patent

active

046364030

ABSTRACT:
A process of laser-induced metal deposition for repairing transparent defects (18) in patterned metal films (14) of photomasks (10). The process comprises the steps of (a) coating the surface (16) of the substrate (12) having the film (14) thereon with a layer of metal-organic compound (50); (b) exposing the portions of the layer of metal-organic compound (50) overlying the defects (18) to a beam (24) of electromagnetic radiation from a laser (22); (c) ramping the power level of the radiation beam (24) delivered by the laser (22) until a metal patch (52) is reflective and adherent is formed; and (d) removing the unexposed portions of metal-organic compound (50) remaining on the substrate surface (16).

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patent: 4444801 (1984-04-01), Hongo et al.
patent: 4463073 (1984-07-01), Miyauchi et al.
patent: 4510222 (1985-04-01), Okunaka et al.
Article entitled "How to Apply Noble Metals to Ceramics", R. T. Hopper, Ceramics Industry, Jun. 1963.

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